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Effect of layer thickness on structural quality of Ge epilayers grown directly on Si(001)

Materials ScienceMaterials EngineeringLayer ThicknessEpitaxial GrowthEngineeringApplied PhysicsStructural QualitySemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMolecular Beam EpitaxyGe EpilayersChemical Vapor DepositionMicrostructure