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Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays

Electrical EngineeringWafer Scale ProcessingEngineeringCorrosion ProtectionMicrofabricationCorrosionPassivation LayersSilicon-based Microelectrode ArraysApplied PhysicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsCorrosion ResistanceElectrical Insulation