Schottky Junction Methane Sensors Using Electrochemically Grown Nanocrystalline‐Nanoporous ZnO Thin Films

Abstract

Nanocrystalline‐nanoporous ZnO thin films were prepared by an electrochemical anodization method, and the films were tested as methane sensors. It was found that Pd‐Ag catalytic contacts showed better sensing performance compared to other noble metal contacts like Pt and Rh. The methane sensing temperature could be reduced to as low as 100 ° C by sensitizing nanocrystalline ZnO thin films with Pd, deposited by chemical method. The sensing mechanism has been discussed briefly.