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Kinematics and experimental study on ultrasonic vibration-assisted micro end grinding of silica glass

Materials ScienceEngineeringMicromechanicsMicrofabricationMechanicsMechanical EngineeringSilica GlassExperimental StudyAcoustic TweezerUltrasoundAcoustic CavitationMicromachined Ultrasonic Transducer