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Fabrication and optical characterization of thin two-dimensional Si3N4 waveguides

DOI

71

Citations

11

References

2004

Year

N. Daldosso, M. Melchiorri, Francesco Riboli, Francesca Sbrana, Lorenzo Pavesi, G. Pucker, C. Kompocholis, Michele Crivellari, P. Bellutti, A. Lui
Materials Science in Semiconductor Processing

References

YearCitations

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