Microfluidic system modeling using VHDL-AMS and circuit simulation

A bidirectional silicon micropump

Roland Zengerle, Joachim Ulrich, Stefan Kluge et al. · Sensors and Actuators A Physical · 1995 · 314 citations

Engineering, Electrical Engineering, Materials Engineering +12

CAD For Microelectromechanical Systems

S.D. Senturia · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 49 citations

Engineering, Mechanical Engineering, Systems Engineering +16

Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method

Joachim Ulrich, Roland Zengerle · Sensors and Actuators A Physical · 1996 · 44 citations

Engineering, Electrical Engineering, Materials Engineering +12

Tailored modeling: A way to the 'virtual microtransducer fab'?

G. Wachutka · Sensors and Actuators A Physical · 1995 · 41 citations

Engineering, Computational Engineering, Microfabrication +3

Domain characterization of transmission line models and analyses

Rohini Gupta, Seok-Yoon Kim, Lawrence T. Pileggi · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1996 · 28 citations

Engineering, Electrical Engineering, Circuit Theory +15