Sensors and Actuators A Physical · 2015 · 36 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceHeat TransferMicrofabricationThin FilmsChemical Vapor DepositionThermal DesignThermal ManagementThin Film Thermal PropertiesThin-film DepositionThin-film MaterialsExperimental CharacterizationHeat Capacity Of Thin FilmsHeatersLab-on-a-chipLab-on-a-chip FabricationSubstrate Effects On Thermal PropertiesThermal Properties Of GlassThin Film Thermal Transport
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