Defect annealing in ultra-thin polycrystalline silicon films on glass: Rapid thermal versus laser processing - Concepedia

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Defect annealing in ultra-thin polycrystalline silicon films on glass: Rapid thermal versus laser processing

25

Citations

11

References

2013

Year

Wei Li, Sergey Varlamov, Jonathon Dore, Martin A. Green

Materials Letters

Materials ScienceEngineeringMicrofabricationApplied PhysicsSemiconductor Device FabricationAmorphous SolidSilicon On InsulatorMicroelectronicsThin Film Processing

References

	Year	Citations

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