A study of Ti–C–N(H) and Ti:CNx(H) coatings grown with a magnetron sputtering/PECVD hybrid deposition process

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.6K citations

Natural Sciences, Materials Engineering, Materials Science +16

Tribological and electrical properties of metal-containing hydrogenated carbon films

H. Dimigen, H. Hübsch, R. Memming · Applied Physics Letters · 1987 · 256 citations

Natural Sciences, Materials Engineering, Materials Science +17

Deposition of wear resistant coatings based on diamond like carbon by unbalanced magnetron sputtering

Dermot Monaghan, D.G. Teer, Paul Logan et al. · Surface and Coatings Technology · 1993 · 181 citations

Natural Sciences, Materials Engineering, Materials Science +14

Proton elastic scattering cross sections of carbon, nitrogen and silicon for backscattering analysis in the energy range 0.7—2.5 MeV

E. Raühala · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 116 citations

Natural Sciences, Materials Science, Physics +12

Inductively coupled plasma assisted deposition and mechanical properties of metal-free and Ti-containing hydrocarbon coatings

W. J. Meng, Efstathios I. Meletis, L.E. Rehn et al. · Journal of Applied Physics · 2000 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +17