Concepedia

Phase analysis of TaN/Ta barrier layers in sub-micrometer trench structures for Cu interconnects

M. Traving, I. Zienert, Ehrenfried Zschech, G. Schindler, W. Steinhögl, M. Engelhardt

Applied Surface Science · 2005 · 27 citations · 3 references

DOI

Concepts

References

3

Size-dependent resistivity of metallic wires in the mesoscopic range

W. Steinhögl, G. Schindler, G. Steinlesberger et al. · Physical review. B, Condensed matter · 2002 · 533 citations

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The self-hosting structure of β-Ta

Alla Arakcheeva, G. Chapuis, V.V. Grinevitch · Acta Crystallographica Section B Structural Science · 2001 · 64 citations · Full text

, , +16

Influence of N content on microstructure and thermal stability of Ta–N thin films for Cu interconnection

M. Hecker, D. Fischer, Volker Hoffmann et al. · Thin Solid Films · 2002 · 34 citations

, , +14