High-temperature, cyclic-loading stage for the scanning electron microscope

Abstract

A stage for the ETEC Corp. SEM has been designed and constructed, which is capable of cyclicly loading a specimen up to 4000 N at temperatures up to at least 750 °C. The specimen is symmetrically loaded so that it may be observed dynamically under high resolution. Loading frequencies from static up to 4 Hz may be used, with a resolution of about 50 nm on the specimen for static loading and 100 nm for dynamic (TV scan rate) observation in the secondary electron mode. Load is applied with a closed-loop, servocontrolled hydraulic system. Heating is by resistive elements surrounding the specimen grips. Extensive radiative shielding is used for heat containment, with leakage extracted by liquid cooling of the pull rods and outer shielding.