Thin Solid Films · 1998 · 29 citations · 3 references
EngineeringMaterials EngineeringMaterials ScienceCrystal StructureSemiconductor MaterialsThin FilmsSemiconductor Crystal GrowthSemiconductor PhysicsSemiconductor SurfacesSemiconductor Thin FilmsSilicon MaterialsThin-film MaterialsCrystalline SiliconMicrostructureMicrostructure DevelopmentSilicon Thin FilmsThin-film Semiconductors
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