Roughness in Nb/Cu multilayers determined by x-ray diffraction and atomic force microscopy

Abstract

Nb/Cu multilayers grown by molecular beam epitaxy have been studied by x-ray diffraction and atomic force microscopy. X-ray diffraction provides the average interface roughness while atomic force microscopy shows the roughness and topology of the upper surface. Comparison of both methods shows that high-angle diffraction averages over a lateral length which is in good agreement with the typical grain size.