Polyimide microcantilever surface stress sensor using low-cost, rapidly-interchangeable, spring-loaded microprobe connections - Concepedia

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Polyimide microcantilever surface stress sensor using low-cost, rapidly-interchangeable, spring-loaded microprobe connections

13

Citations

9

References

2008

Year

Robert H. Ibbotson, Richard J. Dunn, V. Djakov, Paul Ko Ferrigno, S.E. Huq

Microelectronic Engineering

Materials ScienceEngineeringMicrofabricationMechanical EngineeringMicroelectromechanical SystemsSensor DesignSpring-loaded Microprobe ConnectionsFlexible SensorMicrofluidicsMicro-electromechanical SystemStress Sensor

References

	Year	Citations

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