Growth of La–Ca–Mn–O films by ozone-assisted molecular beam epitaxy

Abstract

We have grown very high quality epitaxial thin films of La–Ca–Mn–O on SrTiO3 and LaAlO3 using ozone-assisted molecular beam epitaxy and the block-by-block deposition technique. Films of thicknesses of at least 600 Å are fully strained and are tetragonal on both SrTiO3 (100) and LaAlO3 (100) substrates, and are single phase with extremely low rocking curve widths (about 0.067°), suggesting a high degree of structural perfection. Magnetoresistance values of 900% at an applied field of 5.5 T have been obtained for as-deposited La0.58Ca0.33MnO3 films.