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A New Two-Dimensional Electron Gas Field-Effect Transistor Fabricated on Undoped AlGaAs–GaAs Heterostructure
30
Citations
8
References
1984
Year
SemiconductorsSemiconductor TechnologyElectrical EngineeringEngineeringMos Transistor-like ModeField-effect TransistorApplied PhysicsMultilayer HeterostructuresUndoped Algaas–gaas HeterostructureMolecular Beam EpitaxySemiconductor Device
A new two-dimensional electron gas (2DEG) field-effect transistor (FET) which operates in an MOS transistor-like mode is fabricated on undoped AlGaAs–GaAs heterostructures grown by both molecular beam epitaxy and organometallic vapour phase epitaxy. This device with very simple structure is expected to have performance comparable to those of selectively doped heterostructure FETs and can easily be integrated.
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