Publication | Closed Access
All-water-based electron-beam lithography using silk as a resist
283
Citations
17
References
2014
Year
Materials ScienceAll-water-based Electron-beam LithographyEngineeringElectron-beam LithographyMicrofabricationBeam LithographySurface ScienceApplied PhysicsNanolithographyNanolithography Method
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