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Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

Materials ScienceMagnetismOptical MaterialsEngineeringMaterial AnalysisOxide ElectronicsSurface ScienceApplied PhysicsSubstrate TemperatureDc MagnetronMagnetic Thin FilmsThin FilmsElectrical PropertiesThin Film Processing