Publication | Open Access
Bistability in silicon microring resonator based on strain induced by a piezoelectric lead zirconate titanate thin film
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Citations
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References
2012
Year
EngineeringSilicon On InsulatorMicro-electromechanical SystemPiezoelectric Thin FilmOptical PropertiesOptical SwitchingPiezoelectric MaterialPhotonic Integrated CircuitNanophotonicsMaterials SciencePhotonicsPiezoelectric ResponsePhysicsPiezoelectricityMicroelectronicsHysteresis BehaviorElectro-optics DeviceMicrofabricationApplied PhysicsNano Electro Mechanical SystemOptoelectronics
We demonstrate bistability in a submicron silicon optical phase shifter based on the photoelastic effect. The strain magnitude is electrically controlled by a piezoelectric thin film placed on top of the device. The hysteresis behavior of the piezoelectric response shows potential application as bistable device independent of the optical intensity.
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