Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 12 citations · 22 references
EngineeringMaterials EngineeringMaterials ScienceInterface ScienceSurface EngineeringSurface ScienceFirst Wall EngineeringIon ImplantationPlasma Surface TreatmentSurface ModificationSurface PassivationSurface PhysicsAnnealingFirst-wall MaterialsIon Beam Surface TreatmentIon Implantation EffectsPost-implantation AnnealingSurface Modification By Ion ImplantationThermal AnnealingThermal Annealing Effects
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