Optical technique for producing 0.1-μ periodic surface structures

C. V. Shank, R. V. Schmidt

Applied Physics Letters · 1973 · 90 citations · 8 references

Concepts

Abstract

Surface corrugations with a period of 1108 Å and a depth of [inverted lazy s] 500 Å have been fabricated in glass. These corrugations were first produced in a photoresist film on glass by the optical interference of two 3250-Å laser beams. The corrugation was transferred to the glass by ion beam etching.

References

8