Sensors and Actuators A Physical · 1995 · 330 citations · 59 references
EngineeringElectrical EngineeringMaterials ScienceBiosensorsMicroelectromechanical SystemsSensorsMechanical SensorsMems SensorsMicroelectromechanical SensorsPiezoelectric CeramicsPiezoelectric MaterialsSensor MaterialsPiezoelectric ResonatorsPiezoelectric SensingPiezoelectric Sensors
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