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Rapid communication Fabrication of nano-dot- and nano-ring-arrays by nanosphere lithography
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1996
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Materials ScienceEngineeringBeam LithographyNanomaterialsNanotechnologyMicrofabricationNanonetworkApplied PhysicsNanolithographyNanofabricationNanosphere LithographyNanostructure SynthesisNanometrologyNanolithography Method
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