Integrated sensor for ultra-thin layer sensing based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide

Abstract

Based on a hybrid coupler composed of short-range surface plasmon polariton (SRSPP) and dielectric waveguides, an integrated sensor for ultra-thin layer sensing has been realized. The simulation and experiment results demonstrate that the thickness variation of detection layer (polymer layer) about several nanometers could be detected. The measured thickness-detection sensitivity is as high as 0.67 dB/nm. And the sensitive region for thickness variation of polymer layer can be adjusted widely by varying the thickness of the SRSPP waveguide.