Publication | Closed Access
In situ study of film stress and kinetics of platinum silicide formation on silicon
12
Citations
8
References
1984
Year
Materials ScienceEngineeringSitu StudySurface ScienceApplied PhysicsSiliceneFilm StressChemistryPlatinum Silicide FormationSilicon On InsulatorChemical Vapor DepositionThin Film ProcessingMicrostructureSilicon Debugging
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