Room-temperature tunable microwave properties of strained SrTiO3 films

Wontae Chang, S. W. Kirchoefer, J.M. Pond, Jeffrey A. Bellotti, S. B. Qadri, J. H. Haeni, Darrell G. Schlom

Journal of Applied Physics · 2004 · 33 citations · 17 references

Concepts

Abstract

Structural distortion of ferroelectric thin films caused by film strain has a strong impact on the microwave dielectric properties. SrTiO3 thin films epitaxially grown on (110)DyScO3 substrates using molecular beam epitaxy are extremely strained (i.e., ∼1% in-plane tensional strain) from 3.905Å of bulk SrTiO3. The room-temperature in-plane dielectric constant and its tuning of the films at 10GHz are observed to be 6000 and 75% with an electric field of 1V∕μm, respectively. The control of strain in SrTiO3 provides a basis for room-temperature tunable microwave applications by elevating its phase-transition peak to room temperature.

References

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