Concepedia

Publication | Closed Access

Depth profiling of hydrogen in crystalline silicon using elastic recoil detection analysis

DOI

15

Citations

13

References

2001

Year

R.D. Verda, C.J. Maggiore, J.R. Tesmer, Amit Misra, T. Hoechbauer, M. Nastasi, R.W. Bower
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

Page 1