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Directional growth and crystallization of silicon thin films prepared by electron-beam evaporation on oblique and textured surfaces

Materials ScienceEpitaxial GrowthEngineeringPhysicsMicrofabricationSilicon On InsulatorSurface ScienceApplied PhysicsElectron-beam EvaporationThin FilmsChemical Vapor DepositionMicroelectronicsSilicon Thin FilmsThin Film ProcessingDirectional Growth