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ESCA and SEXAFS investigations of insulating materials for ULSI microelectronics

Materials EngineeringMaterials ScienceElectromigration TechniqueSexafs InvestigationsEngineeringApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsElectrical PropertyElectrical Insulation