Concepedia

Publication | Closed Access

High spatial resolution 3D analysis of materials using gallium focused ion beam secondary ion mass spectrometry (FIB SIMS)

DOI

32

Citations

5

References

1998

Year

Bunbunoshin Tomiyasu, Isamu Fukuju, H. Komatsubara, Masanori Owari, Yoshimasa Nihei
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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