Microelectronics Journal · 2007 · 36 citations · 19 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsElectromagneticsElectromagnetismElectric ActuatorsMagnetic ActuationMagnetic ActuatorsMagnetic Circuit AnalysisDiaphragm ActuatorsDiaphragm MechanicsElectromagnetic ActuationElectromagnetic ActuatorsElectromagnetic Force GenerationMagnetic Force ModelingMicroactuatorsMicropumps
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Plasticity for structural engineers
Journal of Constructional Steel Research · 1989 · 590 citations
A bidirectional silicon micropump
Roland Zengerle, Joachim Ulrich, Stefan Kluge et al. · Sensors and Actuators A Physical · 1995 · 314 citations
Engineering, Electrical Engineering, Materials Engineering +12