Publication | Open Access
An electron-multiplying ‘Micromegas’ grid made in silicon wafer post-processing technology
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Citations
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References
2005
Year
Electrical EngineeringWafer Scale ProcessingEngineeringAdvanced Packaging (Semiconductors)Energy EfficiencyMicrofabricationPost-processing TechnologySemiconductor Device FabricationElectronic PackagingMicroelectronicsMicro TechnologyInterconnect (Integrated Circuits)
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