Integrated optic temperature and humidity sensors

Abstract

Temperature sensor of the integrated optic structure was constructed using a Michelson interferometer configuration with an asymmetric <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">X</tex> junction and a grooved reflector on a LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> substrate. With this structure, larger difference in the optical paths lengths for two beams is provided to realize higher sensitivity. Also a humidity sensor of the optical guided-wave structure is proposed and its first known demonstration is reported.