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Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester

On-chip Micro-tribotesterEngineeringBulk-microfabricated Mems DevicesMicromachinesMicrofabricationMechanicsMechanical EngineeringDynamic Friction CoefficientsFriction ControlMicroactuatorMicrofluidicsMechanics Of MaterialsMicro-electromechanical System