Concepedia

Publication | Closed Access

RBS-ERDA, XPS and XRD characterizations of PECVD tungsten nitride films

DOI

20

Citations

10

References

1998

Year

C. Meunier, C. Monteil, C. Savall, Frank Palmino, J. Weber, R. Berjoan, J. Durand
Applied Surface Science

References

YearCitations

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