Growth of single crystal GaAs and metastable (GaSb)1−xGexAlloys by sputter deposition: Ion-surface interaction effects - Concepedia

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Growth of single crystal GaAs and metastable (GaSb)1−xGexAlloys by sputter deposition: Ion-surface interaction effects

33

Citations

25

References

1982

Year

J. E. Greene, Scott A. Barnett, Ken Cadien, Mark Ray

Journal of Crystal Growth

SemiconductorsMaterials ScienceEngineeringCrystalline DefectsCrystal Growth TechnologySurface ScienceApplied PhysicsSputter DepositionThin FilmsIon-surface Interaction EffectsEpitaxial GrowthChemical Vapor DepositionSingle Crystal Gaas

References

	Year	Citations

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