Concepedia

Publication | Closed Access

Mechanical properties of PECVD a-SiC:H thin films prepared from methyltrichlorosilane

DOI

14

Citations

22

References

2006

Year

S. N. Dub, O. K. Porada, L. A. Ivashchenko, P. L. Skrynskyy, A.I. Stegniy
Surface and Coatings Technology

References

YearCitations

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