Electrodeposited 80Ni–20Fe (Permalloy) as a structural material for high aspect ratio microfabrication - Concepedia

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Electrodeposited 80Ni–20Fe (Permalloy) as a structural material for high aspect ratio microfabrication

50

Citations

20

References

2006

Year

Thomas Edward Buchheit, S.H. Goods, Paul G. Kotula, Paul F. Hlava

Materials Science and Engineering A

Materials ScienceMaterials EngineeringEngineeringMicrofabricationMechanical EngineeringBiomedical DevicesMicroscale SystemMicroactuatorMicro-electromechanical System

References

	Year	Citations

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