Nanometer-scale Si selective growth on Ga-adsorbed voids in ultrathin SiO2 films - Concepedia

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Nanometer-scale Si selective growth on Ga-adsorbed voids in ultrathin SiO2 films

10

Citations

16

References

1999

Year

Yoshiki Nitta, Motoshi Shibata, Ken Fujita, Masakazu Ichikawa

Surface Science

Materials ScienceEngineeringNanotechnologySurface ScienceApplied PhysicsSemiconductor MaterialGa-adsorbed VoidsSilicon On InsulatorEpitaxial GrowthUltrathin Sio2 FilmsThin Film Processing

References

	Year	Citations

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