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Physical properties of amorphous Mo-doped In–Ga–Zn–O films grown by magnetron co-sputtering technique

Materials ScienceMaterials EngineeringMagnetron Co-sputtering TechniqueEngineeringOxide ElectronicsApplied PhysicsCondensed Matter PhysicsGallium OxideThin Film Process TechnologyThin FilmsAmorphous SolidThin Film ProcessingPhysical Properties