Metamaterials on parylene thin film substrates: Design, fabrication, and characterization at terahertz frequency

Abstract

We design, fabricate, and characterize terahertz (THz) resonant metamaterials on parylene free-standing thin film substrates. Several different metamaterials are investigated and our results show strong electromagnetic responses at THz frequencies ranging from 500 GHz to 2.5 THz. The complex frequency dependent dielectric properties of parylene are determined from inversion of reflection and transmission data, thus indicating that parylene is an ideal low loss substrate or coating material. The biostable and biocompatible properties of parylene coupled with the multifunctional exotic properties of metamaterials indicate great potential for medical purposes such as THz imaging for skin cancer detection.