Concepedia

Publication | Closed Access

Correlation between ion-flux and microstructure of a-C:H films

DOI

36

Citations

14

References

1992

Year

H. Ehrhardt, R. Kleber, A. Kru ̈ger, W. Dworschak, K. Jung, I. Mu ̈hling, F. Engelke, H. Metz
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References

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