Concepedia

Pulsed KrF excimer laser annealing of silicon solar cell

H. Azuma, Akihisa Takeuchi, T. Ito, Hiroki Fukushima, Tomoyoshi Motohiro, Masafumi Yamaguchi

Solar Energy Materials and Solar Cells · 2002 · 42 citations · 2 references

DOI

Concepts

References

2

Excimer laser crystallization and doping of silicon films on plastic substrates

Patrick M. Smith, P.G. Carey, T. W. Sigmon · Applied Physics Letters · 1997 · 171 citations

, , +17

Growth of microcrystalline silicon film by electron beam excited plasma chemical vapor deposition without hydrogen dilution

Mitsuru Imaizumi, Kazuhiko Okitsu, Masafumi Yamaguchi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 16 citations

, , +17