Doping influence on intrinsic stress and carrier mobility of LP-MOCVD-deposited ZnO:B thin films

Control of preferred orientation for ZnO films: control of self-texture

Norifumi Fujimura, Tokihiro Nishihara, Seiki Goto et al. · Journal of Crystal Growth · 1993 · 678 citations

Materials Science, Materials Engineering, Engineering +7

Al-doped zinc oxide films deposited by simultaneous rf and dc excitation of a magnetron plasma: Relationships between plasma parameters and structural and electrical film properties

R. Cebulla, R. Wendt, K. Ellmer · Journal of Applied Physics · 1998 · 515 citations

Engineering, Glow Discharge, Vacuum Device +20

Use of ion beam assisted deposition to modify the microstructure and properties of thin films

F.A. Smidt · International Materials Reviews · 1990 · 410 citations

Materials Science, Materials Engineering, Ion Implantation +11

Postdeposition annealing of radio frequency magnetron sputtered ZnO films

M. K. Puchert, P. Y. Timbrell, Robert N. Lamb · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 276 citations

Materials Engineering, Magnetism, Materials Science +14

Electrical and optical properties of boron-doped ZnO thin films for solar cells grown by metalorganic chemical vapor deposition

Wilson W. Wenas, Akira Yamada, Kiyoshi Takahashi et al. · Journal of Applied Physics · 1991 · 260 citations

Optical Materials, Engineering, Sheet Resistivity +16