Publication | Closed Access
Injection Dependence of Transient Annealing in Neutron-Irradiated Silicon Devices
53
Citations
4
References
1967
Year
SemiconductorsSemiconductor TechnologyElectrical EngineeringIon ImplantationEngineeringInjection LevelCrystalline DefectsPhysicsAnnealing FactorBias Temperature InstabilityApplied PhysicsNeutron SourceSingle Event EffectsSemiconductor Device FabricationInjection DependenceEv Activation EnergySilicon Debugging
Studies have been performed to explore accurately the injection level and temperature dependence of transient annealing in neutron-irradiated P- and N-type silicon. In P-type material, the annealing factor in the 0 to 0.1 second time interval is very sensitive to the minority carrier injection level. For example, by varying the injection level from 10-5 to 10-1 the annealing factor at 0.001 second can be reduced from 10 to approximately 2. In contrast to the P-type results, the injection dependence observed in N-type silicon is very small and, furthermore, is in the opposite sense; i.e., an increase in the injection level causes an increase in the annealing factor. However, this study shows that this seemingly different behavior can be correlated on the basis of the hole-to-electron ratios of the different material types and resistivities. Annealing measurements performed in the temperature range from 180°to 300°K reaffirm the 0.3 eV activation energy previously found in P-type silicon and establish a value of 0.17 eV for N-type silicon.
| Year | Citations | |
|---|---|---|
Page 1
Page 1