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A graphical method for determining the parameters of a diffusion profile in silicon by infrared reflection spectroscopy

EngineeringGraphical MethodPhysicsDiffusion ResistanceOptical PropertiesSpectroscopyNatural SciencesApplied PhysicsDiffusion ProcessDiffusion ProfileSemiconductor Device FabricationInfrared Reflection SpectroscopySilicon On InsulatorMicroelectronicsSilicon Debugging