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Nanomechanics of a self-assembled monolayer on microcantilever sensors measured by a multiple-point deflection technique

Materials ScienceMultiple-point Deflection TechniqueEngineeringMicrofabricationNanotechnologyMechanical EngineeringNano Electro Mechanical SystemSelf-assembled MonolayerMicrofluidicsNanomechanicsMicrocantilever SensorsMicro-electromechanical System