Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 142 citations · 0 references
Natural SciencesChemistryMaterials ScienceInorganic ChemistryPhysical ChemistrySurface ChemistryChemical OxidationMetal OxidesOxidation-reduction ReactionsRedox ChemistryRedox ProcessesSurface OxidationComplex OxidesLayer-based CompositionOxide Layer FormationOxide Layer MorphologySurface Oxidation MechanismsSurface Oxidation States
XPS techniques are used for a comparative study of ion induced effects in simple oxides (ZrO2, SiO2, TiO2) and complex oxides (ZrSiO4, CaTiSiO5, La2TiO5, PbTiO3). We have found that reduction effects in simple and complex oxides differ. The interpretation of altered layer composition has been qualitatively considered in terms of the preferential loss of oxygen and reverse chemical reactions.