Applied Physics Letters · 1967 · 29 citations · 5 references
Natural SciencesElectrical EngineeringMaterials ScienceAcousticsMicrowave EngineeringThin FilmsAcoustic MaterialsThin-film DepositionTransducer TechnologyUltrasonicsUltrasound InstrumentationBandwidthDeposition TechniquesTransducer FabricationTransducersUltrasonic AcousticsUltrasonic TransducersVacuum DepositionZinc Oxides
Thin-film zinc-oxide microwave acoustic transducers have been formed successfully by vacuum deposition techniques upon a cooled substrate (−50°C) by evaporation of zinc with an oxygen beam. The films are hexagonal preferentially oriented with c axis normal to the substrate. A device consisting of a ZnO film (1.9 μ) deposited on a metallic film on a sapphire delay line had a one-way conversion loss of 6 dB at 1.6 GHz with a large bandwidth indicating that zinc-oxide thin films deposited by this method make good ultrasonic transducers at frequencies above 1 GHz.
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Piezoelectric transducer materials
Hans Jaffe, D. Berlincourt · Proceedings of the IEEE · 1965 · 538 citations
Natural Sciences, Materials Engineering, Materials Science +17
Natalie Foster, G. A. Rozgonyi · Applied Physics Letters · 1966 · 61 citations
Natural Sciences, Materials Engineering, Materials Science +8