A side-entry liquid He cooled stage for the Philips EM400 electron microscope (ion implantation application)

Abstract

The authors describe a liquid He cooled stage for the side entry goniometer of the Philips EM400 transmission electron microscope (TEM). A stable temperature of 10K is reached on the specimen. The resolution is 15 AA (1.5 mm) at about 15K. Calculations taking into account electron and ion beam heating are detailed.